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GA has all of the required infrastructure to fabricate
gold and dielectric
gratings up to 16” diameter in size with sub-micron
periods.
These facilities include:
2000 sq ft Class 10000+ cleanroom
Liquid Coating up to 24”
Large Area RIE
Holographic Exposure Table using active fringe lock
control
Diagnostics, including Laser test setup, 18” interferometer,
SEM, AFM
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