Fabrication Facility

Diffraction gratings are fabricated using photolithographic
techniques with the following steps:



GA has all of the required infrastructure to fabricate gold and dielectric
gratings up to 16” diameter in size with sub-micron periods.

These facilities include:
2000 sq ft Class 10000+ cleanroom
Liquid Coating up to 24”
Large Area RIE
Holographic Exposure Table using active fringe lock control
Diagnostics, including Laser test setup, 18” interferometer, SEM, AFM